JPS6346831Y2 - - Google Patents
Info
- Publication number
- JPS6346831Y2 JPS6346831Y2 JP4243382U JP4243382U JPS6346831Y2 JP S6346831 Y2 JPS6346831 Y2 JP S6346831Y2 JP 4243382 U JP4243382 U JP 4243382U JP 4243382 U JP4243382 U JP 4243382U JP S6346831 Y2 JPS6346831 Y2 JP S6346831Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- receiving surface
- base
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4243382U JPS58165637U (ja) | 1982-03-25 | 1982-03-25 | 圧力変換器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4243382U JPS58165637U (ja) | 1982-03-25 | 1982-03-25 | 圧力変換器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58165637U JPS58165637U (ja) | 1983-11-04 |
JPS6346831Y2 true JPS6346831Y2 (en]) | 1988-12-05 |
Family
ID=30053564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4243382U Granted JPS58165637U (ja) | 1982-03-25 | 1982-03-25 | 圧力変換器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58165637U (en]) |
-
1982
- 1982-03-25 JP JP4243382U patent/JPS58165637U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58165637U (ja) | 1983-11-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3141645B2 (ja) | 圧力センサ | |
JP4320593B2 (ja) | Sawデバイスと併用される圧力モニター | |
EP0456029B1 (en) | Vibrating type pressure measuring device | |
JP2656566B2 (ja) | 半導体圧力変換装置 | |
JPH0349060B2 (en]) | ||
JP2010197298A (ja) | 圧力センサー素子、圧力センサー | |
US4133100A (en) | Method of making diaphragm of optimized stress and strain distribution | |
JPS6346831Y2 (en]) | ||
US6923060B2 (en) | Capacitive-type acceleration sensor | |
JP4864438B2 (ja) | 圧力を検知するためのシステム及び方法 | |
JP2007093213A (ja) | 圧力センサ | |
JPS60186725A (ja) | 圧力センサ | |
JP2770488B2 (ja) | 半導体圧力計 | |
JPH0120706Y2 (en]) | ||
CN222704203U (zh) | 一种全石英谐振式力传感器芯片结构 | |
CN217331183U (zh) | 超声波传感器去耦元件及超声波传感器结构 | |
CN119510912B (zh) | 宽频带电场传感器组件及电场检测方法 | |
JPH0619068Y2 (ja) | 高温流体用の圧力センサ | |
RU2107273C1 (ru) | Барочувствительный элемент | |
WO2020228738A1 (zh) | 压敏元件、压敏元件的制备方法和压力传感器 | |
JPS6110197Y2 (en]) | ||
JPH0141208B2 (en]) | ||
JPH06331473A (ja) | 半導体圧力計 | |
JPS5937715Y2 (ja) | 圧力計 | |
JPS6346830Y2 (en]) |